yl9193永利(中国)有限公司官网

卡马勒·托克达尔汗副教授
学历：		工学博士
职称：		副教授
研究方向：		半导体物理与器件
联系方式：		kamale@xju.edu.cn
办公地点：		新疆乌鲁木齐市水磨沟区华瑞街777号永利集团(博达校区) 物理楼A302
卡马勒·托克达尔汗，女，哈萨克族，中共党员，工学博士，副教授，硕士研究生导师。2014年3月博士毕业于东京工业大学，2014年4月至2015年7月在日本东芝集团锂电池研究组从事了研究工作，2015年9月以来在yl9193永利官网从事教学科研工作，主要研究方向为半导体物理与器件，重点研究高k栅介质/金属栅MOS器件中的关键问题。近年来主持国家自然科学基金2项、新疆维吾尔自治区自然科学基金项目2项，参与国家自然科学基金3项。先后在Appl. Phys. Lett.，Vacuum，Mater. Res. Express等重要国际学术期刊上发表SCI收录学术论文20余篇。自工作以来，先后承担磁性物理与器件、大学物理实验、材料物理、材料腐蚀与防护等课程的教学。
承担主要科研项目：
（1）新疆维吾尔自治区自然科学基金， CMOS器件所用碳化物金属栅材料的功函数调控技术研究，2021/06-2024/5，项目负责人。
（2）国家自然科学基金专项项目，高k栅介质/金属栅结构CMOS器件的有效功函数调控技术研究，2022/01-2022/12，项目负责人。
（3）国家自然科学基金青年科学基金项目， CMOS器件用金属碳化物栅极材料的制备和性能研究，2017/01-2019/12，项目负责人。
（4）新疆维吾尔自治区自然科学基金，用磁控溅射法制备金属氧化物半导体器件（CMOS）所用的金属栅材料，2017/01-2019/12，项目负责人。
（5）永利集团自然科学基金项目，金属碳化钨材料的制备工艺及性能研究，2017/4-2019/3，项目负责人。
*发表主要学术论文（注：加号为通讯作者）**
[1] Hongguo Du; Kamale Tuokedaerhan#; Renjia Zhang; Electrical performance of La-doped In2O3 thin-film transistors prepared using a solution method for low-voltage driving, RSC Advances, 2024.
[2] Haotian Cai; Kamale Tuokedaerhan#; Zhenchuan Lu; Renjia Zhang; Hongguo Du ; Interface
tuning and electrical property optimization of La-doped ZrO2 gate dielectric based on solution
driving, Vacuum, 2023, 217: 112542-112542
[3] Zhenchuan Lu, Kamale Tuokedaerhan#, Haotian Cai, Hongguo Du, Renjia Zhang, Effect of Annealing Temperature on the Structure and Properties of La2O3 High-K Gate Dielectric Films Prepared by the Sol-Gel Method, Coatings, 2023, 13: 1085.
[4] Haotian Cai, Kamale Tuokedaerhan#, Zhenchuan Lu, Hongguo Du, Renjia Zhang, Effect of Heat Treatment on Zirconium Oxide High-k Gate Dielectric in Silicon-Based Metal Oxide Semiconductor Capacitors, PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2023. 2200903(1-8).
[5] Xiangduo Cui, Kamale Tuokedaerhan#, Haotian Cai, Zhenchuan Lu, Effect of Annealing Temperature on the Microstructure and Optical Properties of Lanthanum-Doped Hafnium Oxide, Coatings, 2022, 12(4): 439-439.
[6] Haotian Cai, Kamale Tuokedaerhan#, Zhenchuan Lu, Renjia Zhang, Hongguo Du, Effect of Annealing Temperature on the Structural, Optical, and Electrical Properties of Al-Doped ZrO2 Gate Dielectric Films Treated by the Sol–Gel Method, Coatings, 2022, 12(12): 1837.
[7] Litipu Aihaiti, Kamale Tuokedaerhan#, Beysen Sadeh, Min Zhang, Xiangqian Shen, Electrical and Structural Properties of Non-Reactive Dual Magnetron Sputter Deposited W–C Thin Films for Metal Gate, Russian Journal of Physical Chemistry A, 2021, 95(5): 1003-1008.
[8] Litipu Aihaiti, Kamale Tuokedaerhan#, Beysen Sadeh, Min Zhang, Xiangqian Shen, Effect of Annealing Temperature on Microstructure and Resistivity of TiC Thin Films, Coatings, 2021, 11(457): 1-13.
[9] Zhiye Wang, Shuying Wang, Yue Jiang, Hua Zhou, Kamale Tuokedaerhan, Yanhua Chen and Xiangqian Shen,Optimized design of silver nanoparticles for broadband and high efficiency light trapping in thin film solar cells, Modern Physics Letters B, 2021, 35(13): 2150224.
[10] Xiangqian Shen, Shuying Wang, Hua Zhou, Kamale Tuokedaerhan, Yanhua Chen, Improving thin film solar cells performance via designing moth-eye-like nanostructure arrays, Results in Physics, 2021, 20:102713.
[11] Litipu Aihaiti, Kamale Tuokedaerhan#, Beysen Sadeh, Min Zhang, Xiang Qian Shen, Electrical and microstructural properties of Ta-C thin films for metal gate, Materials Research Express, 2020, 7(7): 076402-076402
[12] Min Zhang, Kamale Tuokedaerhan, Hongyan Zhang, Lin Li, Ultraviolet photodetector based on Au doped TiO2 nanowires array with low dark current, Optoelectronics Letters, 2019, 15(2): 0081.
[13] Min Zhang, Meishan Li, Huimin Zhang, Kamale Tuokedaerhan, Aimin Chang, Synthesis of pilot-scale Co2Mn1.5Fe2.1Zn0.4O8 fabricated by hydrothermal method for NTC thermistor, JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 797:1295-1298.
[14] Min Zhang, Meishan Li, Huimin Zhang, Kamale Tuokedaerhan, Aimin Chang, Synthesis of pilot-scale Co2Mn1.5Fe2.1Zn0.4O8fabricated by hydrothermal method for NTC thermistor, Journal of Alloys and Compounds,797, pp:1295-1298, 2019.
[15] 张文倩，张敏，王曼，卡马勒·托克达尔汗，新型Ti2O3基湿敏传感器的研制，材料科学与工程学报，37（2），300-303, 2019.
[16] Min Zhang, Hongyan Zhang, Lin Li, Kamale Tuokedaerhan, Zhenhong Jia, Er-enhanced humidity sensing performance in black ZnO-based sensor, Journal of Alloys and Compounds,744, pp:364-369,2018.
[17] K. Tuokedaerhan, K. Kakushima, Y. Kataoka, A. Nishiyama, N. Sugii, H. Wakabayashi, K. Tsutsui, K. Natori, and H. Iwai, Atomically flat La-silicate/Si interface using tungsten carbide gate electrode with nano-sized grain, Appl. Phys. Lett. Vol. 104, pp: 021601, 2014.
[18] K. Tuokedaerhan, R. Tan, K. Kakushima, P. Ahmet, Y. Kataoka, A. Nishiyama, N. Sugii, H. Wakabayashi, K. Tsutsui, K. Natori, T. Hattori, H. Iwai, Stacked sputtering process for Ti, Ta, and W carbide formation for gate metal application, Appl. Phys. Lett., Vol. 103, pp: 111908, 2013.
[19] K. Tuokedaerhan, R. Tan, K. Kakushima, P. Ahmet, Y. Kataoka, A. Nishiyama, N. Sugii, K. Tsutsui , K. Natori, T. Hattori, H. Iwai. Interface properties of La-silicate MOS capacitors with tungsten carbide gate electrode for scaled EOT. ECS Trans., 50(4), pp: 281-284, 2013.
[20] S. Hosoda, K. Tuokedaerhan, K. Kakushima, Y. Kataoka, A. Nishiyama, N. Sugii,
H. Wakabayashi, K. Tsutsui, K. Natori, H. Iwai. Reliability of La-silicate MOS capacitors with tungsten carbide gate electrode for scaled EOT. ECS Trans., 58(7), pp:61-64, 2013.